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Calculation of Surface Excitation Parameters by a Monte Carlo Method
Zhe Zheng,Bo Da,Shi-feng Mao,Ze-jun Ding
Author NameAffiliationE-mail
Zhe Zheng CAS Key Laboratory of Geospace Environment, Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China  
Bo Da National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan  
Shi-feng Mao School of Nuclear Science and Technology, University of Science and Technology of China, Hefei 230026, China  
Ze-jun Ding Hefei National Laboratory for Physical Sciences at the Microscale and Department of Physics, University of Science and Technology of China, Hefei 230026, China zjding@ustc.edu.cn 
Abstract:
Electron inelastic mean free path (IMFP) is an important parameter for surface chemical quantification by surface electron spectroscopy techniques. It can be obtained from analysis of elastic peak electron spectroscopy (EPES) spectra measured on samples and a Monte Carlo simulation method. To obtain IMFP parameters with high accuracy, the surface excitation effect on the measured EPES spectra has to be quantified as a surface excitation parameter (SEP), which can be calculated via a dielectric response theory. However, such calculated SEP does not include influence of elastic scattering of electrons inside samples during their incidence and emission processes, which should not be neglected simply in determining IMFP by an EPES method. In this work a Monte Carlo simulation method is employed to determine surface excitation parameter by taking account of the elastic scattering effect. The simulated SEPs for different primary energies are found to be in good agreement with the experiments particularly for larger incident or emission angles above 60° where the elastic scattering effect plays a more important role than those in smaller incident or emission angles. Based on these new SEPs, the IMFP measurement by EPES technique can provide more accurate data.
Key words:  Eelastic peak electron spectroscopy  Surface excitation parameter  Monte Carlo simulation
FundProject:This work was supported by the National Natural Science Foundation of China (No.11274288 and No.11574289).We thank the Supercomputing Center of USTC for support in performing parallel computations.
蒙特卡洛方法计算材料表面激发参数
郑哲,达博,毛世峰,丁泽军
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DOI:10.1063/1674-0068/30/cjcp1607146
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