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Plasma treatment enhanced magnetic properties in manganese doped titanium nitride thin films
lidan76
Author NameAffiliationE-mail
lidan76 none lidan76@mail2.sysu.edu.cn 
Abstract:
The ferromagnetic manganese doped films were deposited by plasma assisted molecular beam epitaxy on MgO(001) substrates. Nitrogen plasma is exerted on the as prepared Mn doped titanium nitride thin films during annealing process. The nitrogen concentration and the ratio of manganese at lattice sites increased after the plasma treatment. TiN(002) peak shifts toward low angle and TiN(111) peak disappears after the post treatment. The lattice expansion and peak shift are mainly ascribed to the elimination of nitrogen vacancies in films. The magnetism can be suppressed in as-prepared sample due to the pinning effect of the nitrogen vacancies at defect sites or interface. The magnetism can be activated by the plasma implantation along with nitrogen vacancies reduce. The increase nitrogen vacancies leads to the enhancement of ferromagnetism.
Key words:  ferromagnetic films  nitrogen plasma anneal  titanium nitride  pinning effect
FundProject:
Plasma treatment enhanced magnetic properties in manganese doped titanium nitride thin films
lidan76
摘要:
The ferromagnetic manganese doped films were deposited by plasma assisted molecular beam epitaxy on MgO(001) substrates. Nitrogen plasma is exerted on the as prepared Mn doped titanium nitride thin films during annealing process. The nitrogen concentration and the ratio of manganese at lattice sites increased after the plasma treatment. TiN(002) peak shifts toward low angle and TiN(111) peak disappears after the post treatment. The lattice expansion and peak shift are mainly ascribed to the elimination of nitrogen vacancies in films. The magnetism can be suppressed in as-prepared sample due to the pinning effect of the nitrogen vacancies at defect sites or interface. The magnetism can be activated by the plasma implantation along with nitrogen vacancies reduce. The increase nitrogen vacancies leads to the enhancement of ferromagnetism.
关键词:  ferromagnetic films  nitrogen plasma anneal  titanium nitride  pinning effect
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