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Spherical Micro-lens Array of PMMA Produced by Micro-molding
Jian-hua Zhu, Jin-xia Shi, Yuan Wang, Ping-sheng He*
Department of Polymer Science and Engineering, University ofScience and Technology of China, Hefei 230026, China
Abstract:
Micro-lens (ML) and Micro-lens array (MLA) are important optical components widely used in many fields;Soft-lithography, a vital little process technology, has its unique performance to produce ML and MLA;The cylinder and spherical MLA of polymethyl methacrylate (PMMA) were successfully obtained by micromolding inSoft-lithography. Some suitable experimental parameters in the process were discussed, and the imaging property of the MLA was also studied simply.
Key words:  Micro-molding, Polymethyl methacrylate (PMMA), Micro-lens array
FundProject:
微模塑法制备PMMA球面微透镜阵列
朱建华  , 石锦霞   , 汪元  , 何平笙*
中国科学技术大学高分子科学与工程系,合肥,230026
摘要:
借助微透镜及其阵列的光学器件,采用软刻蚀技术中的微模塑方法成功制备了聚甲基丙烯酸甲酯(PMMA)的柱体及球面微透镜阵列,并对该微透镜阵列进行了光学显微和SEM分析.通过考察制备过程中的影响因素,探讨了减少阵列缺陷和提高光学性能的适宜参数.并对该透镜阵列的光学成像性能进行了初步研究.
关键词:  热模塑  聚甲基丙烯酸甲酯  微透镜阵列
DOI:10.1360/cjcp2006.19(5).443.4
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