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Spherical Micro-lens Array of PMMA Produced by Micro-molding
Jian-hua Zhu,Jin-xia Shi,Yuan Wang,Ping-sheng He*
Author NameAffiliationE-mail
Jian-hua Zhu Department of Polymer Science and Engineering, University ofScience and Technology of China, Hefei 230026, China  
Jin-xia Shi Department of Polymer Science and Engineering, University ofScience and Technology of China, Hefei 230026, China  
Yuan Wang Department of Polymer Science and Engineering, University ofScience and Technology of China, Hefei 230026, China  
Ping-sheng He* Department of Polymer Science and Engineering, University ofScience and Technology of China, Hefei 230026, China hpsm@ustc.edu.cn 
Abstract:
Micro-lens (ML) and Micro-lens array (MLA) are important optical components widely used in many fields;Soft-lithography, a vital little process technology, has its unique performance to produce ML and MLA;The cylinder and spherical MLA of polymethyl methacrylate (PMMA) were successfully obtained by micromolding inSoft-lithography. Some suitable experimental parameters in the process were discussed, and the imaging property of the MLA was also studied simply.
Key words:  Micro-molding, Polymethyl methacrylate (PMMA), Micro-lens array
FundProject:
微模塑法制备PMMA球面微透镜阵列
朱建华  ,石锦霞   ,汪元  ,何平笙*
摘要:
借助微透镜及其阵列的光学器件,采用软刻蚀技术中的微模塑方法成功制备了聚甲基丙烯酸甲酯(PMMA)的柱体及球面微透镜阵列,并对该微透镜阵列进行了光学显微和SEM分析.通过考察制备过程中的影响因素,探讨了减少阵列缺陷和提高光学性能的适宜参数.并对该透镜阵列的光学成像性能进行了初步研究.
关键词:  热模塑  聚甲基丙烯酸甲酯  微透镜阵列
DOI:10.1360/cjcp2006.19(5).443.4
分类号: