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Micro-structure of PECVD Diamond Films by Slow Positron Beam
Yan Xu,Hui-min Weng*,Bang-jiao Ye,Hai-yang Zhou,Hai-yun Wang,Cheng-xiao Peng,Chuan-ying Xi,Bin Cheng,Xian-yi Zhou,Rong-dian Han
Author NameAffiliationE-mail
Yan Xu Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China  
Hui-min Weng* Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China wenghm@ustc.edu.cn  
Bang-jiao Ye Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China  
Hai-yang Zhou Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China  
Hai-yun Wang Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China  
Cheng-xiao Peng Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China  
Chuan-ying Xi Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China  
Bin Cheng Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China  
Xian-yi Zhou Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China  
Rong-dian Han Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China  
Abstract:
The microstructure of diamond films was studied by slow positron beam and Raman spectroscopy. For the Raman spectroscopy experiment on diamond films, a high fraction of the sp3 hybridized bond was detected in samples. Positron annihilation spectra analysis further illuminated that the concentration and types of defects were different in each sample. S-E curves of all samples showed that diamond crystal structures had obvious variation in each sample. These results indicated that positron annihilation spectroscopy was an effective means to measure microstructure of diamond films.
Key words:  Diamond film, Defect, Slow positron, Diffusion
FundProject:
金刚石膜微结构的慢正电子束测量研究
徐燕,翁惠民*,叶邦角,周海洋,王海云,彭成晓,郗传英,成斌,周先意,韩荣典
摘要:
用慢正电子束辅助以拉曼光谱方法对一批较高质量的PECVD金刚石膜的微结构进行测量研究.拉曼光谱实验结果显示,这批金刚石膜中金刚石相含量比较高,正电子湮没实验进一步从微观结构上指出各个金刚石膜之间存在很大差异,并且从缺陷角度发现各样品中缺陷尺寸和缺陷浓度不一样,造成膜质量不同.S-E曲线变化趋势反映出各样品金刚石晶体结构存在明显不同.这表明正电子湮没技术是测量金刚石膜微结构的有力手段.
关键词:  金刚石膜, 缺陷, 慢正电子, 扩散长度
DOI:10.1360/cjcp2006.19(4).291.3
分类号: