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Fabrication of TiO2 Microstructure
Liu Jianping, He Pingsheng*
Department of Polymer Science and Engineering,University of Science and Technology of China,Hefei 230026
Abstract:
The representative soft lithographic techniques are used,which are micromolding and microtransfer molding methods to fabricate the micro array patterned titanium dioxide on glass substrates. Firstly titanium dioxide sol was synthesized by sol-gel method using tetrabutyl titanate as the precursor,then the pre-patterned poly(dimethylsiloxane) elastomeric stamp was used to mold the TiO2 sol on glass substrate by micromolding and microtransfer molding methods,micro patterned TiO2 sol was gelled at 70℃ with 0. 5 N pressure applied on the PDMS stamp,further heat treatment of TiO2 gel by annealing at 550℃ for 2 h produced the TiO2 microstructure. The TiO2 microstructure was observed by the optical microscope and the optical micrographs demonstrated the satisfactory yield and fidelity of pattern transfer by micromolding method and microtransfer method. The effect of gel temperature,the pressure applied on the PDMS stamp and the silicone mold on the fidelity and yield of TiO2 microstructure are discussed.
Key words:  Soft lithography,Micromolding,Microtransfer molding,Titanium dioxide
FundProject:
TiO2微图纹结构的制作
刘建平, 何平笙*
中国科学技术大学高分子科学与工程系,合肥 230026
摘要:
用软刻蚀技术中具有代表性的方法———微模塑法和转移微模塑法,在普通光学玻璃表面成功制备出TiO2微阵列结构. 首先,以钛酸四丁酯为前驱物,通过溶胶-凝胶法合成出TiO2溶胶,然后用表面带有微图纹的有机硅橡胶PDMS 作为弹性印章分别对所制得的TiO2溶胶进行微模塑及转移微模塑加工,在70℃下溶胶凝胶,进而让凝胶材料在550℃下焙烧2 h得到TiO2微结构. 用光学显微镜对所得到的微结构进行了显微观察,显微照片显示,微模塑法和转移微模塑法在制备材料微结构方面复制精细度和重复率都比较令人满意. 同时,还初步探讨了影响最终图纹复制效果的凝胶温度、外加压力及模板等因素.
关键词:  软刻蚀  微模塑  转移微模塑  二氧化钛
DOI:10.1088/1674-0068/17/2/215-218
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