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Broad-Range Detection of Water Vapor using Cavity Ring-down Spectrometer
Bing Chen,Jin Wang,Yu R. Sun,Peng Kang,An-wen Liu,Jian-ying Li,Xiao-lei He,Shui-ming Hu*
Author NameAffiliationE-mail
Bing Chen Hefei National Laboratory for Physical Sciences at the Microscale, iChem Center, University of Science and Technology of China, Hefei 230026, China  
Jin Wang Hefei National Laboratory for Physical Sciences at the Microscale, iChem Center, University of Science and Technology of China, Hefei 230026, China  
Yu R. Sun Hefei National Laboratory for Physical Sciences at the Microscale, iChem Center, University of Science and Technology of China, Hefei 230026, China  
Peng Kang Hefei National Laboratory for Physical Sciences at the Microscale, iChem Center, University of Science and Technology of China, Hefei 230026, China  
An-wen Liu Hefei National Laboratory for Physical Sciences at the Microscale, iChem Center, University of Science and Technology of China, Hefei 230026, China  
Jian-ying Li Meteorological Observation Centre, China Meteorological Administration, Beijing 100081, China  
Xiao-lei He Meteorological Observation Centre, China Meteorological Administration, Beijing 100081, China  
Shui-ming Hu* Hefei National Laboratory for Physical Sciences at the Microscale, iChem Center, University of Science and Technology of China, Hefei 230026, China smhu@ustc.edu.cn 
Abstract:
Quantitative measurement of water vapor is essential in many fields including semiconduc-tor industry, combustion diagnosis, meteorology, and atmospheric studies. We present an optical hygrometer based on cavity ring-down spectroscopy. The instrument is high-vacuum compatible, self-calibrated by using the free-spectral-range of the ring-down cavity made of low-thermal-expansion Invar. Using a single tunable diode laser working at 1.39 μm, detection of trace water vapor in vacuum and in high-purity helium gas, and also determination of humidity at ambient conditions, have been demonstrated. It indicates that the instrument can be used to detect the partial pressure of water vapor in a very broad range from 10-7 Pa to 103 Pa. Such an optical hygrometer can be potentially applied as a primary moisture standard to determine the vapor pressures of water (ice) at low temperatures.
Key words:  Cavity ring-down, Water vapour, Ro-vibrational spectroscopy
FundProject:
基于光腔衰荡光谱的宽范围水汽探测
陈兵,王进,孙羽,康鹏,刘安雯,李建英,贺晓雷,胡水明*
摘要:
介绍基于光腔衰荡光谱技术的光学湿度测量装置.该装置具有高真空兼容性,衰荡腔由低膨胀的殷钢制成,并利用其自身的自由光谱范围实现光谱的自标定.使用单个在1.39 μm的半导体激光器,实 现了从真空、高纯氦气中痕量水汽,一直到大气湿度的测量,可测量的水汽分压范围极大:0.1 μPa~1 kPa.该光学湿度计可用于作为基本水汽标准,以及测定低温下水(冰)的蒸气压.
关键词:  光腔衰荡光谱,水汽,痕量探测,红外吸收
DOI:10.1063/1674-0068/28/cjcp1507160
分类号: