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Quantitative Moisture Measurement with a Cavity Ring-down Spectrometer using Telecom Diode Lasers
Bing Chen1, Peng Kang1, Jian-ying Li2, Xiao-lei He2, An-wen Liu1, Shui-ming Hu*1
1.Hefei National Laboratory for Physical Sciences at the Microscale, University of Science and Tech-nology of China, Hefei 230026, China;2.Meteorological Observation Centre, China Meteorological Administration, Beijing 100081, China
Abstract:
Moisture measurement is of great needs in semiconductor industry, combustion diagnosis, meteorology, and atmospheric studies. We present an optical hygrometer based on cavity ring-down spectroscopy (CRDS). By using different absorption lines of H2O in the 1.56 and 1.36 μm regions, we are able to determine the relative concentration (mole fraction) of water vapor from a few percent down to the 10-12 level. The quantitative accuracy is examined by comparing the CRDS hygrometer with a commercial chilled-mirror dew-point meter. The high sensitivity of the CRDS instrument allows a water detection limit of 8 pptv.
Key words:  Cavity ring down spectroscopy  Moisture  Trace detection  Diode laser
FundProject:
基于半导体激光的光腔衰荡光谱装置测定水汽含量
陈兵1, 康鹏1, 李建英2, 贺晓雷2, 刘安雯1, 胡水明*1
1.中国科学技术大学合肥微尺度物质科学国家实验室(筹),合肥 230026;2.中国气象局大气探测中心,北京 100081
摘要:
搭建了一套基于光腔衰荡光谱技术的光学湿度计. 通过测量水分子在1.35和1.56 μm波段不同强度的吸收线,可测定水汽的相对含量,测量范围从10-2到低至10-12水平. 通过与商用冷镜式露点仪的对比测量,对该装置的定量精度进行了检验. 该系统所具备的高灵敏度使得水汽探测极限可达8 pptv
关键词:  光腔衰荡  湿度  半导体  激光光谱
DOI:10.1063/1674-0068/28/cjcp1410185
分类号: