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Preparation and Electrochemical Characteristics of Three-dimensional Manganese Oxide Micro-supercapacitor Electrode
Chun-ming Wen*,Zhi-yu Wen,Zheng You,Xiao-feng Wang
Author NameAffiliationE-mail
Chun-ming Wen* Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400030, China；Microsystem Research Center, Chongqing University, Chongqing 400030, China cquwcm@163.com 
Zhi-yu Wen Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400030, China；Microsystem Research Center, Chongqing University, Chongqing 400030, China  
Zheng You Department of Precision Instruments and Mechanics, Tsinghua University, Beijing 100084, China  
Xiao-feng Wang Department of Precision Instruments and Mechanics, Tsinghua University, Beijing 100084, China  
Abstract:
In order to increase the electrode surface area and enhance the charge storage capacity, we study the micro electro mechanical system technology to fabricate three-dimensional high aspect ratio micro-electrode structure based on glass. The anodic constant potential method is employed to deposit manganese oxide as electroactive substances on the micro-electrode surface. Cyclic voltammetry and constant current charge-discharge method are both used to prepare electrode electrochemical performance testing, with a two-dimensional electrode without structure for comparison. Experimental results show that three-dimensional elec- trode structure can effectively enhance the charge storage capacity. At 1.0 mA/cm2 charge-discharge density, the three-dimensional electrode shows a capacitance of 17.88 mF/cm2, seven times higher than the two-dimensional electrode.
Key words:  Micro-supercapacitor, Micro electro mechanical system, Three-dimensional electrode, Manganese oxide
FundProject:
氧化锰三维微型超级电容器电极制备及电化学特性
文春明*,温志渝,尤政,王晓峰
摘要:
为增强电容器的电荷贮存能力，用MEMS技术在玻璃上制备高深宽比三维微电极结构，以增大电极的表面积，用阳极恒电压沉积在微电极表面沉积氧化锰作为电极活性物质，用循环伏安和恒流充放电方法对所备的电极进行了电化学性能测试，并用无结构的二维电极进行对比实验. 结果表明，三维电极结构能有效增强电容器的电荷贮存能力，在1.0 mA/cm2的充放电密度下，三维电极的单位底面积比电容达17.88 mF/cm2，是相应二维电极的7倍.
关键词:  微型超级电容器，MEMS，三维微电极，二氧化锰
DOI：10.1088/1674-0068/25/02/209-213
分类号: