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Comparative Investigation of Mo(CO)6 Adsorption on Clean and Oxidized Si(111) Surfaces
Zhi-quan Jiang*,Wei-xin Huang*
Author NameAffiliationE-mail
Zhi-quan Jiang* Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Materials for Energy Conversion, Department of Chemical Physics, University of Science and Technology of China, Hefei 230026, China jzhiquan@ustc.edu.cn 
Wei-xin Huang* Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Materials for Energy Conversion, Department of Chemical Physics, University of Science and Technology of China, Hefei 230026, China huangwx@ustc.edu.c 
Abstract:
Mo(CO)6 adsorption on the clean, oxygen-precovered and deeply oxidized Si(111) surfaces was comparatively investigated by high-resolution electron energy loss spectroscopy. The downward vibrational frequency shift of the C-O stretching mode in adsorbed Mo(CO)6 illustrates that different interactions of adsorbed Mo(CO)6 occur on clean Si(111) and SiO2/Si(111) surfaces, weak on the former and strong on the latter. The strong interac-tion on SiO2/Si(111) might lead to the partial dissociation of Mo(CO)6, consequently the formation of molybdenum subcarbonyls. Therefore, employing Mo(CO)6 as the precursor, metallic molybdenum could be successfully deposited on the SiO2/Si(111) surface but not on the clean Si(111) surface. A portion of the deposited metallic molybdenum is transformed into the MoO3 on the SiO2/Si(111) surface upon heating, and the evolved MoO3 finally desorbs from the substrate upon annealing at elevated temperatures.
Key words:  Molybdenum hexacarbonyl, SiO2/Si(111), Interaction, High-resolution elec-tron energy loss spectroscopy
FundProject:
Mo(CO)6在清洁的和氧化的Si(111)表面上吸附的对比
姜志全*,黄伟新*
摘要:
采用高分辨电子能量损失谱对比研究Mo(CO)6在清洁的、预吸附氧的和深度氧化的Si(111)表面上的吸附行为. 吸附Mo(CO)6的C-O伸缩振动模式向低频方向移动,说明Mo(CO)6与清洁Si(111)和SiO2/Si(111)表面发生了不同的相互作用,前者较弱而后者较强. 与SiO2/Si(111)表面的强相互作用可能引起Mo(CO)6部分解离,形成部分分解的羰基钼物种.
关键词:  羰基钼,SiO2/Si(111),相互作用,高分辨电子能量损失谱
DOI:10.1088/1674-0068/24/06/729-734
分类号: