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Chemomechanical Production of Functional Structure on Silicon Surfaces
Li-qiu Shi, Yong-da Yan, Feng Wang, Tao Sun*, Shen Dong
Author NameAffiliationE-mail
Li-qiu Shi Precision Engineering Research Institute, Harbin Institute of Technology, Harbin 150001, China  
Yong-da Yan Precision Engineering Research Institute, Harbin Institute of Technology, Harbin 150001, China  
Feng Wang Precision Engineering Research Institute, Harbin Institute of Technology, Harbin 150001, China  
Tao Sun* Precision Engineering Research Institute, Harbin Institute of Technology, Harbin 150001, China jmsdxshiliqiu@163.com 
Shen Dong Precision Engineering Research Institute, Harbin Institute of Technology, Harbin 150001, China  
Abstract:
"The chemomechanical method was used to scribe the silicon surface with a diamond-tipped instrument in the presence of aryldiazonium salt, the silicon and the arenes was connected with covalent bond, and realize simultaneously functionalizing and patterning silicon. This provided experiment basis for building nano-scale functional structure. At first we scribe the silicon with a diamond-tipped instrument in the atmospheric, and get the micro-structure with better surface quality, which was then used as substrate for the next functionalizing and patterning silicon. By the silicon's controlled self-assembly experiments in the solution, the cutting speed, cutting assembly time in accord with the self-assembled monolayers' quality (SAMs), and more parameters suitable for the film growth are obtained. X-ray photoelectron spectroscopy was used to test the self-assembly monolayers, and atomic force microscopy as well as scanning electron microscopy to characterize the surface morphology. Results show that this method can eoiently achieve simultaneously functionalizing and patterning silicon. We also connect the carbon nanotubes to the SAMs, and charatrerize the surface with AFM. This will provide experimental basis for the further study using SAMs to function silicon surface."
Key words:  Chemomechanical method, Function silicon surface, Self-assembly, Monolayer analysis
FundProject:
基于机械-化学的方法在硅表面制造功能化结构
史立秋,闫永达,王风,孙涛*,董申
摘要:
"利用机械与化学结合的方法在芳烃重氮盐溶液中用金刚石刀具切削硅片,使得芳香烃分子和硅之间以共价键连接,实现了对硅片的"成形并功能化""的一步完成.研究了在大气环境如何利用金刚石刀具在硅表面加工出表面质量较好的微结构,为下一步在溶液中"成形并功能化""硅提供好的基底.在溶液中对硅表面进行可控自组装实验,初步研究了切削速度和组装时间对切削处生成自组装膜质量的影响,总结出较适合膜生长的参数.用X射线光电子能谱对自组装膜进行了检测,用扫描电子显微镜和原子力显微镜对自组装膜的表面形貌进行了表征,并用原子力显微镜对自
关键词:  机械化学方法,功能化硅表面,自组装,自组装膜分析
DOI:10.1088/1674-0068/20/06/655-659
分类号: