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| 热解温度对溶胶-凝胶法制备B掺杂ZnO薄膜晶化行为及性能的影响 |
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文斌,刘超前,王楠,王华林,刘世民,姜薇薇,丁万昱,费维栋,柴卫平
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| 作者 | 单位 | E-mail | | 文斌 | 大连交通大学材料科学与工程学院, 大连 116028 | | | 刘超前 | 大连交通大学材料科学与工程学院, 大连 116028 | cqliu@djtu.edu.cn | | 王楠 | 大连交通大学材料科学与工程学院, 大连 116028 | | | 王华林 | 大连交通大学材料科学与工程学院, 大连 116028 | | | 刘世民 | 大连交通大学材料科学与工程学院, 大连 116028 | | | 姜薇薇 | 大连交通大学材料科学与工程学院, 大连 116028 | | | 丁万昱 | 大连交通大学材料科学与工程学院, 大连 116028 | | | 费维栋 | 哈尔滨工业大学材料科学与工程学院, 哈尔滨 150001;青海大学机械工程学院, 西宁 810016 | wdfei@hit.edu.cn | | 柴卫平 | 大连交通大学材料科学与工程学院, 大连 116028 | |
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| DOI：10.1063/1674-0068/29/cjcp1506116 |
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| 基金项目:This work was supported by the National Natural Science Foundation of China (No.51302024, No.51002018 and No.51472039), the Program for Liaoning Excellent Talents in University (No.LJQ2012038), the Higher Specialized Research Fund for the Doctoral Program (No.20122124110004), the Project of Education Department of Liaoning Province (No.L2013179), the Project of Open Research Foundation of State Key Laboratory of Advanced Technology for Float Glass (No.KF1301-01), the Dalian Science and Technology Plan Project (No.2011A15GX025), the Dalian Science and Technology Plan Project (No.2010J21DW008), and the Qinghai Province Science and Technology Project (No.2012-Z-701). |
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| Crystallization Behavior and Properties of B-Doped ZnO Thin Films Prepared by Sol-Gel Method with Di erent Pyrolysis Temperatures |
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Bin Wen,Chao-qian Liu,Nan Wang,Hua-lin Wang,Shi-min Liu,Wei-wei Jiang,Wan-yu Ding,Wei-dong Fei,Wei-ping Chai
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| Abstract: |
| Boron-doped zinc oxide transparent (BZO) films were prepared by sol-gel method. The effect of pyrolysis temperature on the crystallization behavior and properties was systematically investigated. XRD patterns revealed that the BZO films had wurtzite structure with a preferential growth orientation along the c-axis. With the increase of pyrolysis temperature, the particle size and surface roughness of the BZO films increased, suggesting that pyrolysis temperature is the critical factor for determining the crystallization behavior of the BZO films. Moreover, the carrier concentration and the carrier mobility increased with increasing the pyrolysis temperature, and the mean transmittance for every film is over 90% in the visible range. |
| Key words: Transparent conduction oxide Thin film Boron-doped ZnO Pyrolysis temperature Sol-gel |