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Disiloxane-bridged cyclopolymer as polymer dielectrics
刘和文
作者单位E-mail
刘和文 合肥 230026 中国科学技术大学 lhewen@ustc.edu.cn 
摘要:
In this work we studied the dielectric properties of organosilicon-containing helical cyclopolymer pbMA which consists of PMMA main chains and tetramethyldisiloxane side rings. It has a lower dielectric constant of 2.46 at 105 Hz than PMMA (usually above 3.1) but better thermal stability. PbMA can form films with excellent uniformity through spin-coating onto a silicon wafer. The dielectric properties and I-V characteristics of pbMA was studied on a device in which pbMA was deposited as an insulating layer spin-coated over highly n-doped silicon.
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Disiloxane-bridged cyclopolymer as polymer dielectrics
Hewen Liu
Abstract:
In this work we studied the dielectric properties of organosilicon-containing helical cyclopolymer pbMA which consists of PMMA main chains and tetramethyldisiloxane side rings. It has a lower dielectric constant of 2.46 at 105 Hz than PMMA (usually above 3.1) but better thermal stability. PbMA can form films with excellent uniformity through spin-coating onto a silicon wafer. The dielectric properties and I-V characteristics of pbMA was studied on a device in which pbMA was deposited as an insulating layer spin-coated over highly n-doped silicon.
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