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新型成膜法的SAW气体传感器聚合物膜的粘弹性分析
王文,何世堂*,潘勇
作者单位
王文 中国科学院声学研究所,北京,100080 
何世堂* 中国科学院声学研究所,北京,100080 
潘勇 防化研究院,北京,102205 
摘要:
分析了一种基于自组装和分子印迹技术的声表面波气体传感器的响应模型.首先利用Martin理论和Auld的摄动方法分析金膜对于声表面波的扰动效应,然后将其扩展至覆盖于金膜上的聚合物膜对于声波的扰动分析.以剪切模量的实部为参量,可以将聚合物分为三种状态,即玻璃状膜、玻璃状-橡胶态膜和橡胶态膜.最后模拟分析了聚合物膜对于气体的吸附特性.结果表明由于聚合物膜的粘弹特性,传感器响应与其工作频率并不完全呈线性.通过实验获得了不同膜厚的采用新型成膜方法的聚合物对SAW的扰动效应并与理论计算结果进行对比,结果显示相对不考虑活性表面金膜的Martin理论,对于衰减扰动的分析与实验结果更加一致.但是对速度的扰动与实验结果有一定偏差.另外还模拟了基于新型成膜方式的气体传感器聚合物敏感膜对于气体的吸附效应,结果显示对于玻璃状膜,传感器的响应随着敏感膜厚的增加而递增,并与气体浓度呈现良好的线性特性,但是对于橡胶态膜,传感器灵敏度与膜厚之间的关系相对复杂.
关键词:  声表面波  气体传感器  聚合物  粘弹性
DOI:10.1360/cjcp2006.19(1).47.7
分类号:
基金项目:
Viscoelastic Analysis of a Surface Acoustic Wave Gas Sensor Coated by a New Deposition Technique
Wen Wang,Shi-tang He*,Yong Pan
Abstract:
An analysis of the response of surface acoustic wave sensors coated with polymer film based on new coating deposition (self-assemble and molecularly imprinted technology) is described and the response formulas are hence deduced. Using the real part of shear modulus, the polymer can be classified into three types: glassy film, glassy-rubbery film and rubbery film. Experimental results show that the attenuation response is in better consistence with the simulation than in Martin's theory, but the velocity response does not accord with the calculation exactly. Maybe it is influenced by the experimental methods and environment. In addition, simulations of gas sorption for polymer films are performed. As for glassy film, the SAW sensor response increases with increasing film thickness, and the relationship between the sensor response and the concentration of gas is pretty linear, while as for glassy-rubbery film and rubbery film, the relationship between the sensor sensitivity and concentration of gas is very complicated. The ultimately calculated results indicate that the relationship between the sensor response and frequency is not always linear due to the viscoelastic properties of the polymer.
Key words:  Surface acoustic wave, Gas sensor, Polymer, Viscoelastic property