Micro-structure of PECVD Diamond Films by Slow Positron Beam
- Received Date: 2005-04-27
Abstract: The microstructure of diamond films was studied by slow positron beam and Raman spectroscopy. For the Raman spectroscopy experiment on diamond films, a high fraction of the sp3 hybridized bond was detected in samples. Positron annihilation spectra analysis further illuminated that the concentration and types of defects were different in each sample. S-E curves of all samples showed that diamond crystal structures had obvious variation in each sample. These results indicated that positron annihilation spectroscopy was an effective means to measure microstructure of diamond films.
|Citation:||Yan Xu, Hui-min Weng, Bang-jiao Ye, Hai-yang Zhou, Hai-yun Wang, Cheng-xiao Peng, Chuan-ying Xi, Bin Cheng, Xian-yi Zhou, Rong-dian Han. Micro-structure of PECVD Diamond Films by Slow Positron Beam[J]. Chinese Journal of Chemical Physics , 2006, 19(4): 291-293. doi: 10.1360/cjcp2006.19(4).291.3|