Bing Chen, Peng Kang, Jian-ying Li, Xiao-lei He, An-wen Liu, Shui-ming Hu. Quantitative Moisture Measurement with a Cavity Ring-down Spectrometer using Telecom Diode Lasers[J]. Chinese Journal of Chemical Physics , 2015, 28(1): 6-10. doi: 10.1063/1674-0068/28/cjcp1410185
Citation: Bing Chen, Peng Kang, Jian-ying Li, Xiao-lei He, An-wen Liu, Shui-ming Hu. Quantitative Moisture Measurement with a Cavity Ring-down Spectrometer using Telecom Diode Lasers[J]. Chinese Journal of Chemical Physics , 2015, 28(1): 6-10. doi: 10.1063/1674-0068/28/cjcp1410185

Quantitative Moisture Measurement with a Cavity Ring-down Spectrometer using Telecom Diode Lasers

doi: 10.1063/1674-0068/28/cjcp1410185
  • Received Date: 2014-10-23
  • Moisture measurement is of great needs in semiconductor industry, combustion diagnosis, meteorology, and atmospheric studies. We present an optical hygrometer based on cavity ring-down spectroscopy (CRDS). By using different absorption lines of H2O in the 1.56 and 1.36 μm regions, we are able to determine the relative concentration (mole fraction) of water vapor from a few percent down to the 10-12 level. The quantitative accuracy is examined by comparing the CRDS hygrometer with a commercial chilled-mirror dew-point meter. The high sensitivity of the CRDS instrument allows a water detection limit of 8 pptv.
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Quantitative Moisture Measurement with a Cavity Ring-down Spectrometer using Telecom Diode Lasers

doi: 10.1063/1674-0068/28/cjcp1410185

Abstract: Moisture measurement is of great needs in semiconductor industry, combustion diagnosis, meteorology, and atmospheric studies. We present an optical hygrometer based on cavity ring-down spectroscopy (CRDS). By using different absorption lines of H2O in the 1.56 and 1.36 μm regions, we are able to determine the relative concentration (mole fraction) of water vapor from a few percent down to the 10-12 level. The quantitative accuracy is examined by comparing the CRDS hygrometer with a commercial chilled-mirror dew-point meter. The high sensitivity of the CRDS instrument allows a water detection limit of 8 pptv.

Bing Chen, Peng Kang, Jian-ying Li, Xiao-lei He, An-wen Liu, Shui-ming Hu. Quantitative Moisture Measurement with a Cavity Ring-down Spectrometer using Telecom Diode Lasers[J]. Chinese Journal of Chemical Physics , 2015, 28(1): 6-10. doi: 10.1063/1674-0068/28/cjcp1410185
Citation: Bing Chen, Peng Kang, Jian-ying Li, Xiao-lei He, An-wen Liu, Shui-ming Hu. Quantitative Moisture Measurement with a Cavity Ring-down Spectrometer using Telecom Diode Lasers[J]. Chinese Journal of Chemical Physics , 2015, 28(1): 6-10. doi: 10.1063/1674-0068/28/cjcp1410185

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