Zhi-quan Jiang, Wei-xin Huang. Comparative Investigation of Mo(CO)6 Adsorption on Clean and Oxidized Si(111) Surfaces[J]. Chinese Journal of Chemical Physics , 2011, 24(6): 729-734. doi: 10.1088/1674-0068/24/06/729-734
Citation: Zhi-quan Jiang, Wei-xin Huang. Comparative Investigation of Mo(CO)6 Adsorption on Clean and Oxidized Si(111) Surfaces[J]. Chinese Journal of Chemical Physics , 2011, 24(6): 729-734. doi: 10.1088/1674-0068/24/06/729-734

Comparative Investigation of Mo(CO)6 Adsorption on Clean and Oxidized Si(111) Surfaces

doi: 10.1088/1674-0068/24/06/729-734
Funds:  This work was supported by the National Natural Sci-ence Foundation of China (No.20803072, No.20973161, and No.11079033), the Ministry of Science and Tech-nology of China (No.2010CB923302), the MOE pro-gram for PCSIRT (No.IRT0756), the Science and Tech-nological Fund of Anhui Province for Outstanding Youth (No.2009SQRZ003ZD), and the MPG-CAS part-ner group program.
  • Received Date: 2011-07-07
  • Mo(CO)6 adsorption on the clean, oxygen-precovered and deeply oxidized Si(111) surfaces was comparatively investigated by high-resolution electron energy loss spectroscopy. The downward vibrational frequency shift of the C-O stretching mode in adsorbed Mo(CO)6 illustrates that different interactions of adsorbed Mo(CO)6 occur on clean Si(111) and SiO2/Si(111) surfaces, weak on the former and strong on the latter. The strong interac-tion on SiO2/Si(111) might lead to the partial dissociation of Mo(CO)6, consequently the formation of molybdenum subcarbonyls. Therefore, employing Mo(CO)6 as the precursor, metallic molybdenum could be successfully deposited on the SiO2/Si(111) surface but not on the clean Si(111) surface. A portion of the deposited metallic molybdenum is transformed into the MoO3 on the SiO2/Si(111) surface upon heating, and the evolved MoO3 finally desorbs from the substrate upon annealing at elevated temperatures.
  • 加载中
  • 加载中
通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

  1. 本站搜索
  2. 百度学术搜索
  3. 万方数据库搜索
  4. CNKI搜索

Article Metrics

Article views(1445) PDF downloads(1316) Cited by()

Proportional views
Related

Comparative Investigation of Mo(CO)6 Adsorption on Clean and Oxidized Si(111) Surfaces

doi: 10.1088/1674-0068/24/06/729-734
Funds:  This work was supported by the National Natural Sci-ence Foundation of China (No.20803072, No.20973161, and No.11079033), the Ministry of Science and Tech-nology of China (No.2010CB923302), the MOE pro-gram for PCSIRT (No.IRT0756), the Science and Tech-nological Fund of Anhui Province for Outstanding Youth (No.2009SQRZ003ZD), and the MPG-CAS part-ner group program.

Abstract: Mo(CO)6 adsorption on the clean, oxygen-precovered and deeply oxidized Si(111) surfaces was comparatively investigated by high-resolution electron energy loss spectroscopy. The downward vibrational frequency shift of the C-O stretching mode in adsorbed Mo(CO)6 illustrates that different interactions of adsorbed Mo(CO)6 occur on clean Si(111) and SiO2/Si(111) surfaces, weak on the former and strong on the latter. The strong interac-tion on SiO2/Si(111) might lead to the partial dissociation of Mo(CO)6, consequently the formation of molybdenum subcarbonyls. Therefore, employing Mo(CO)6 as the precursor, metallic molybdenum could be successfully deposited on the SiO2/Si(111) surface but not on the clean Si(111) surface. A portion of the deposited metallic molybdenum is transformed into the MoO3 on the SiO2/Si(111) surface upon heating, and the evolved MoO3 finally desorbs from the substrate upon annealing at elevated temperatures.

Zhi-quan Jiang, Wei-xin Huang. Comparative Investigation of Mo(CO)6 Adsorption on Clean and Oxidized Si(111) Surfaces[J]. Chinese Journal of Chemical Physics , 2011, 24(6): 729-734. doi: 10.1088/1674-0068/24/06/729-734
Citation: Zhi-quan Jiang, Wei-xin Huang. Comparative Investigation of Mo(CO)6 Adsorption on Clean and Oxidized Si(111) Surfaces[J]. Chinese Journal of Chemical Physics , 2011, 24(6): 729-734. doi: 10.1088/1674-0068/24/06/729-734

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return