Comparative Investigation of Mo(CO)6 Adsorption on Clean and Oxidized Si(111) Surfaces
- Received Date: 2011-07-07
- Molybdenum hexacarbonyl, SiO2/Si(111), Interaction, High-resolution elec-tron energy loss spectroscopy
Abstract: Mo(CO)6 adsorption on the clean, oxygen-precovered and deeply oxidized Si(111) surfaces was comparatively investigated by high-resolution electron energy loss spectroscopy. The downward vibrational frequency shift of the C-O stretching mode in adsorbed Mo(CO)6 illustrates that different interactions of adsorbed Mo(CO)6 occur on clean Si(111) and SiO2/Si(111) surfaces, weak on the former and strong on the latter. The strong interac-tion on SiO2/Si(111) might lead to the partial dissociation of Mo(CO)6, consequently the formation of molybdenum subcarbonyls. Therefore, employing Mo(CO)6 as the precursor, metallic molybdenum could be successfully deposited on the SiO2/Si(111) surface but not on the clean Si(111) surface. A portion of the deposited metallic molybdenum is transformed into the MoO3 on the SiO2/Si(111) surface upon heating, and the evolved MoO3 finally desorbs from the substrate upon annealing at elevated temperatures.
|Citation:||Zhi-quan Jiang, Wei-xin Huang. Comparative Investigation of Mo(CO)6 Adsorption on Clean and Oxidized Si(111) Surfaces[J]. Chinese Journal of Chemical Physics , 2011, 24(6): 729-734. doi: 10.1088/1674-0068/24/06/729-734|