Large scale homogenous growth of microcrystalline silicon (μc-Si:H) on cheap substrates by inductively coupled plasma (ICP) of Ar diluted SiH4
has been studied. From XRD and Raman spectrum, we find that substrates can greatly affect the crystalline orientation, and the μc-Si:H films are comprised of small particles. Thickness detection by surface profilom-etry shows that the thin μc-Si:H films are homogenous in large scale. Distributions of both ion density and electron temperature are found to be uniform in the vicinity of substrate by means of diagnosis of Langmuir probe. Based on these experimental results, it can be proposed that rough surfaces play important roles in the crystalline network formation and Ar can affect the reaction process and improve the characteristics of μc-Si:H films. Also, ICP reactor can deposit the thin film in large scale.