Wen-feng Zhao, Jun-fang Chen, Yan Wang, Ran Meng, Yi-ran Zhao, Shi-yun Shao, Ji-yun Li, Yun Zhang. Large Scale Homogeneous Growth Mechanics of Microcrystalline Silicon Films on Rough Surface[J]. Chinese Journal of Chemical Physics , 2010, 23(4): 447-450. doi: 10.1088/1674-0068/23/04/447-450
Citation: Wen-feng Zhao, Jun-fang Chen, Yan Wang, Ran Meng, Yi-ran Zhao, Shi-yun Shao, Ji-yun Li, Yun Zhang. Large Scale Homogeneous Growth Mechanics of Microcrystalline Silicon Films on Rough Surface[J]. Chinese Journal of Chemical Physics , 2010, 23(4): 447-450. doi: 10.1088/1674-0068/23/04/447-450

Large Scale Homogeneous Growth Mechanics of Microcrystalline Silicon Films on Rough Surface

doi: 10.1088/1674-0068/23/04/447-450
Funds:  This work was supported by the National Natural Sci-ence Foundation of China (No.10575039) and the Chi-nese Specialized Research Fund for the Doctoral Pro-gram of Higher Education (No.2004057408).
  • Received Date: 2010-01-07
  • Large scale homogenous growth of microcrystalline silicon (μc-Si:H) on cheap substrates by inductively coupled plasma (ICP) of Ar diluted SiH4 has been studied. From XRD and Raman spectrum, we find that substrates can greatly affect the crystalline orientation, and the μc-Si:H films are comprised of small particles. Thickness detection by surface profilom-etry shows that the thin μc-Si:H films are homogenous in large scale. Distributions of both ion density and electron temperature are found to be uniform in the vicinity of substrate by means of diagnosis of Langmuir probe. Based on these experimental results, it can be proposed that rough surfaces play important roles in the crystalline network formation and Ar can affect the reaction process and improve the characteristics of μc-Si:H films. Also, ICP reactor can deposit the thin film in large scale.

     

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