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在非影像区沉积铜的研究

A Study of the Deposition of Copper in Non-image Area

  • 摘要: 本文用透射电子及微镜和X射线光电子能谱仪对非影像区沉积铜的机理进行了研究.结果表明在影像区的银丝经过氯金酸溶液处理后,由原来的连续缠绕状变细小颗粒,非影像区的明胶能将Au3+还原.还原过程是一个两步反应.第一步生成Au+,这一步在室温下为快反应.明胶对Au+有较高的络合能力;第二步生成金质点,在X射线作用下,Au+能迅速地被还原为金质点.被络合的Au+和部分被还原的金质点作为物理显影核,在以后的铜物理显影过程申催化铜在非形像区的沉积.

     

    Abstract: The mechanism of the deposition of copper in non-image area was studied in this paper by electron micrography and X-ray electron spetrometry. It was shown that by immersing the sample into chloroauric acid soluhon continuous and tangled silver maments in the image area broke into tiny grains, but very little silver chloride and few gold specks was formed. The gelatin in the non-image area can reduce An3+. The reduction process might be divided into two steps.The first stop which is fast at the room temperature is the formation of An+ which is complexed by gelatin. The second step the speed of which can be accelerated by X—ray is the formation of gold sacks. Those complexed An+ and gold specks act as catalytic nuclei during the copper Physical development depositing copper in the non-boage area.

     

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