Abstract: Co₃O₄/SiO₂ catalysts for CO oxidation were prepared by conventional incipient wetness impregnation followed by calcination at various temperatures. Their structures were char-acterized with X-ray diffraction (XRD), laser Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), temperature-programmed reduction (TPR) and X-ray absorption fine structure (XAFS) spectroscopy. Both XRD and Raman spectroscopy only detect the ex-istence of Co₃O₄ crystallites in all catalysts. However, XPS results indicate that excess Co²⁺ ions are present on the surface of Co₃O₄ in Co₃O₄(200)/SiO₂ as compared with bulk Co₃O₄. Meanwhile, TPR results suggest the presence of surface oxygen vacancies on Co₃O₄ in Co₃O₄(200)/SiO₂, and XAFS results demonstrate that Co₃O₄ in Co₃O₄(200)/SiO₂ con-tains excess Co²⁺. Increasing calcination temperature results in oxidation of excess Co²⁺ and the decrease of the concentration of surface oxygen vacancies, consequently the for-mation of stoichiometric Co₃O₄ on supported catalysts. Among all Co₃O₄/SiO₂ catalysts,Co₃O₄(200)/SiO₂ exhibits the best catalytic performance towards CO oxidation, demon-strating that excess Co²⁺ and surface oxygen vacancies can enhance the catalytic activity of Co₃O₄ towards CO oxidation. These results nicely demonstrate the effect of calcination temperature on the structure and catalytic performance towards CO oxidation of silica-supported Co₃O₄ catalysts and highlight the important role of surface oxygen vacancies on Co₃O₄.