Abstract: Amorphous and oriented polycrystalline LiCoO2 thin films, used as cathode material for an all-solid-state thin film battery, were fabricated by using RF magnetron sputtering and annealed at different temperatures. The morphology and structure of LiCoO2 thin films were characterized by scanning electron microscopy and X-ray diffraction. All-solid-state thin film batteries, comprised of LiCoO2 cathode films with different structures, lithium phosphorous oxynitride electrolyte film and metallic lithium anode film, was successfully prepared and their properties were examined by chronopotentiometry. Results showed that the structure and crystallinity of the LiCoO2 films strongly influenced the electrochemical performance of all-solid-state thin film lithium batteries. Worth nothing was the battery with an oriented polycrystalline LiCoO2 film it exhibited the best electrochemical performance, and delivered a discharge capacity of ～55.4 μAh/cm2μm. Furthermore, when subjected to over 450 charge/discharge cycles, that battery suffered no obvious fode in capacity.