Abstract: As a direct wide bandgap semiconductor, CsPbCl₃ has great potential applications in the field of near-ultraviolet photodetectors, lasers and higher-order multiphoton fluorescent detectors. In this work, we synthesized CsPbCl₃ micro/nanocrystals by vapor deposition method with CsCl and PbCl₂ powders as the source materials. It was confirmed that the formation of CsPbCl₃ perovskite through the chemical reaction of CsCl with PbCl₂ occurred in the quartz boat before the source evaporation, not in vapor or on substrate surface. The evaporated CsPbCl₃ can form micro/nanocrystals on substrate surfaces under appropriate conditions. Various morphologies including irregular polyhedrons, rods and pyramids could be observed at lower temperature, while stable and uniform CsPbCl₃ single crystal microplatelets were controllably synthesized at 450 ℃. Prolonging the growth time could modulate the size and density of the microcrystals, but could not change the morphology. Substrate types made little difference to the morphology of CsPbCl₃ crystals. The photoluminescence spectra indicated that the crystallinity and morphology of CsPbCl₃ micro/nanocrystals have significant effects on their optical properties. The work is expected to be helpful to the development of optoelectronic devices based on individual CsPbCl₃ microcrystal.