A High Intensity Continuous Cluster Ion Source

In present work a continuous cluster ion source was bilt up, using an electron gun near the nozzle to produce ion seeds which will form cluster ions We have found and oprimized all possible factors which determine the quality of cluster ion beam, such as electron gun location, skimmer, distance between nozzzle and skimmer etc Effect of mixture ratio of nitrogen and argon on their cluster formation was also studied It is helpful to produce Ar-N₂⁺ that some nitrogen is carried by argon.