Mass Distribution of the Products for the Cl₂ Molecular Beam and InP（100） Surface Reaction

The mass distribution of the products for the Cl₂ and InP（100）surface reaction under 355nm and 560nm laser irradiation has been studied using CW supersonic molecular beam technique coupled with time resolved mass spectrometry. The mass distribution of the products for thermal reaction at surface temperature range of 300K-750K has also been studied by a chopped molecular beam and quadrupole mass spectroscopy using Lock—in amplifier technique. Detailed analysis of the surface temperature dependence of the ion singals of the products InCl⁺、 InCl₂⁺、 PCl⁺、 PCl₂⁺、 PCl₃⁺ is performed. The mechanism of the reaction is discussed.