Corrosion Resistant Thin Film of Chromium-doped Aluminum Oxide Deposited by A Novel Spray Pyrolysis Method

A Al_2-xCr_xO₃ thin film with thickness of 2000Å was prepared by a novel spray pyrolysis method.XRD and XPS analysis identified the film as amorphous A1_2-xCr_xO₃（x=0. 072）. Uniformity of the film was confirmed by SEM and ellipsometer. The film showed good electrical insulating property and excellent corrooion resistance in 40% HF and 10% solution of KMnO₄ in H₂SO₄.