An IR Study on Thin Films of Corundum Type Oxides

The IR transmission spectra of thin films of α-Cr₂O₃, α-Fe₂O₃ on silicon substrate agree with theoretical prediction based on the crystal structure. An IR transmission spectrum can be used to characterizate the phase of thin films of corundum oxides, especially in the range near substrates. The interaction between oxide films and silicon substrates is discussed.