A Study of Titanium Oxide Film Electrodes Prepared by Direct Thermal Oxidation Ⅰ. Preparation, Structure and Electrochemical Properties

The preparation, structure and electrochemical properties of titanium oxide film formed by direct thermally oxidation of titanium were investigated by atomic force microscopy, X-ray diffraction, electrochemical impedance spectroscopy and etc. The results showed that the film is rutile TiO2and the crystallization increases with increasing the oxidation temperature and time, the flat band potential shift to negative with increasing the temperature. The TiO2become compact gradually and the electric conductivity decrease when the temperature was higher than600℃.