Molecular Beam-Surface Scattering Apparatus

Molecular beam-surface scattering technique is a powerful tool for investigating kinetics and dynamics of gas-surface interactions. Its main thrust is to explore on molecular （atomic） scale such macroscopic gas-surface processes as catalysis, corrosion, adsorption, desorption and energy accomodation. It also provides a tool for surface analysis.
The total design （including designs of molecular beam source, modulation chamber, analytic chamber, vacuum system and detecting system） for a molecular beamsurface scattering apparatus in our laboratory is outlined. Then the basic characteristics of this apparatus and experimental techniques （including measurement of beam intensity, beam velocity and cross-section of the beam, molecular beam relaxation spectrometry, variations of translational kinetic energy of the beam, measurement of initial sticking probability and analysis of chemical states of adsorbates on the surface） are reviewed. Finally some examples for applying this apparatus are given.