Crossed Beams Study on the Dynamics of Cl Atom Reaction with Silane

The dynamics of the Cl+SiH₄ reaction has been studied using the universal crossed molecular beam method. Angular resolved time-of-flight spectra have been measured for the channelSiH₃Cl+H. Product angular distributions as well as energy distributions in the center-of-mass frame were determined for the channel. Experimental results show that the SiH₃Clproduct is mainly backward scattered relative to the Cl atom beam direction, suggestingthat the channel takes place via a typical S_N2 type reaction mechanism.