Chemomechanical Production of Functional Structure on Silicon Surfaces

"The chemomechanical method was used to scribe the silicon surface with a diamond-tipped instrument in the presence of aryldiazonium salt, the silicon and the arenes was connected with covalent bond, and realize simultaneously functionalizing and patterning silicon. This provided experiment basis for building nano-scale functional structure. At first we scribe the silicon with a diamond-tipped instrument in the atmospheric, and get the micro-structure with better surface quality, which was then used as substrate for the next functionalizing and patterning silicon. By the silicon's controlled self-assembly experiments in the solution, the cutting speed, cutting assembly time in accord with the self-assembled monolayers' quality (SAMs), and more parameters suitable for the film growth are obtained. X-ray photoelectron spectroscopy was used to test the self-assembly monolayers, and atomic force microscopy as well as scanning electron microscopy to characterize the surface morphology. Results show that this method can eoiently achieve simultaneously functionalizing and patterning silicon. We also connect the carbon nanotubes to the SAMs, and charatrerize the surface with AFM. This will provide experimental basis for the further study using SAMs to function silicon surface."