Preparation and Characterization of Ag2 O/Organicsilicone Self-assemblied Composite Film

The composite film of nanometer AgO2/silane coupling reagent aminopropyltriethoxy-silane (CH3O)3Si(CH2)3NH2was prepared on single-crystal silicon by the self-assembly of silane on the hydroxylated substrate followed with the deposition of nanometer AgO2 on the silane SAMs from an aqueous Ag2O gel. The resultant composite film was characterized by means of X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). The contact angles of distilled water on the silane SAMs and the composite film were measured to compare the surface states. The experiment shows that the nanometer Ag2O can be easily incorporated in the silane SAMs and lead to changed surface state of the composite film. Nanometer Ag2O crystallites in a size of about 20 nm distribute quite uniformly in the composite film. It was anticipated that the composite film might find application to the protection of single-crystal Si substrate in MEMS devices and also propose a novel single electron device structure based on nanoscale Ag2O colloidal particles.