Fabrication of Y2O3-stablized ZrO2 Ultrathin Film by Newly Developed Component-Controllable Langmuir-Blodgett Method

A fabrication technique of component-controllable multi-component ultra thin ceramic films has been developed by a promising LB method. The precursorofY2O3-stablized ZrO2(YSZ) ultra thin film was prepared with ZirconiumIV2, 2,6,6-tetramethylheptanedionate (Zr(tmhd)4) and yttrium 2,2,6,6-tetramethylheptanedionate (Y(tmhd)3) as surface ions on the subphase surface instead of traditional subphase ions. Zr(tmhd)4) and Y(tmhd)3can combine arachidic acid (AA) to forma uniformmixed monolayeron pure water subphase. The π~Aisotherms indicate that the mixed monolayer with a mixed ratio of Zr(tmhd)4∶Y(tmhd)3∶AA=4.5∶1∶11 on pure water is very stable and can be successfully transferred onto the silica substrate by LB technique. Y-type LB films were fabricated. The YSZ films were obtained through a combination of room temperature Ultra-Violet/ozone (UVO) decomposition and annealing treatments at a high temperature. The X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) measurements demonstrate that the fina films are single YSZ phase with a fluorite cubic structure and the components of the films can be accurately controlled through the whole process.