Research for Preparation of SnO2 Ultrafine Particle Films

The ultrafine particle films of tin oxide were deposited on glass substrates by gas discharge activating reaction evaporation. The crystal stracture and surface morphology of typical samples prepared in various conditions was studied by X-ray diffraction spectroscopy and scanning electron microscopy. The results show that the average size of particles increased with oxygen pressure increasing. The uniform and amorphous SnO2ultrafine particle films with an average particle size of 40~50 nm were deposited, when the oxygen pressure was 8 Pa. With increase of oxygen pressure and extension of deposition time the films were oxidized enough and crystallized and the crystal grains grew in SnO2(110). When the discharge voltage was raised, the crystal grains obviously grew in SnO(001) and SnO2(200), respectively. The peak from SnO2(200) was specially strong and sharp and the films had a growing tendency toward single crystallinity.