Discussion on Distribution of Interface Height and Height Difference for Mo2C Thin Film

Procedure for preparing Mo2C thin film by metalorganic chemical deposition(MOCVD)and experimental data on interface roughness are provided,and the rule for distribution of interface height and height difference is given on basis of measured data.Simulation of 2+1 Dimension interface for Mo2C thin film is carried out through generation of DT2 model.The results show that the distribution of height and height difference is agreement with computer simulated one.